Damage threshold fluences for (left panel) carbon allotropes – graphitization of diamond and spallation of amorphous carbon; and (right panel) for crystalline silicon – melting into low-density liquid, high-density liquid, and ablation, calculated with XTANT. Experimental data for graphitization of diamond are shown for comparison; points for photon energies below 300 eV are reproduced from reference [13], while the point at 830 eV is from reference [122].